| 摘要 |
PROBLEM TO BE SOLVED: To prevent a bearing sliding surface from being damaged by radial impact in a hydrostatic gas bearing for a piston drive mechanism. SOLUTION: The piston drive mechanism includes a piston rod 12 and a housing having a function as a cylinder. Front and rear end plates of the housing 20 support front and rear ends of the piston rod 12 in such a manner that the piston rod can move freely in the axial direction, and the hydrostatic gas bearings 100 are arranged at the portions where the end plates of the housing support the piston rod. Lubricating layers are respectively applied to a surface of the piston rod 12 and an inner wall of, for example, the rear end plate 26 at the portion where the hydrostatic gas bearing 100 is arranged. More specifically, when the hydrostatic gas bearing 100 operates, a gap between the piston rod 12 and the rear end plate 26 is formed with the lubricating layers 102, 104 on the side of the rear end plate 26 and the lubricating layer 106 on the side of the piston rod 12, and a gas layer 59 for hovering. The lubricating layers act as buffers against the impact or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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