| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cheap coat-film forming apparatus which facilitates the installation and arrangement of a sensor to a coating nozzle and collision of the coating nozzle and a substrate can be prevented. <P>SOLUTION: A resist-film forming apparatus 10 comprises a loading table 11 of the substrate G, a resist nozzle 12, a horizontal driving mechanism 14 and a elevation mechanism 15 for moving the nozzle 12, a sensor array 20 equipped with an optical sensor 21 for detecting a change of a nozzle gap, a sub-controlling part 60 wherein an output signal is alloted to a standard output signal each of the sensor 21 at the time when the nozzle 12 is arranged at a discharge starting position of a resist liquid and the change of the gap is observed from a difference of the standard output signal and a signal from each sensor 21 when the resist liquid is discharged on the substrate G to form a resist film, and a main controlling part 50 wherein operation of the nozzle 12 is controlled so that a signal about the change of the gap from the sub-controlling part 60 is took in to prevent contact of the nozzle 12 and the substrate G. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
