| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and the like by which the optical path of a beam flux propagating through a scanning optical system is obtained, by which the propagation angle and the optical path including their fluctuations are derived, and by which a deviation between the designed value and the actual propagation angle/optical path of the luminous flux is accurately measured and inspected with a simple and miniaturized structure. SOLUTION: The scanning optical system inspection apparatus is provided with the following requirements: (A) a first light receiving means that receives the beam flux emitted from the optical elements (5, 6) of the scanning optical system (1) to detect the light receiving height; (B) a second light receiving means that is arranged in a manner shifted from the first light receiving means in the optical axis direction and that receives the beam flux emitted from the optical elements to detect the light receiving height; (C) an arithmetic means that draws the height and height deviation of the beam flux, from the beam receiving height detected by the first and the second light receiving means, and that determines the shift quantity and the tilt angle of the beam flux emitted from the optical elements, in the direction vertical to the scanning direction of the beam flux; and (D) a detecting means that detects the propagating optical path of the beam flux of the scanning optical system. COPYRIGHT: (C)2006,JPO&NCIPI
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