| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of micro-optical element capable of reducing a production cost. SOLUTION: Glass substrates 10 are accommodated to recess parts 21 of a glass holder 20 on which strippable adhesive 30 such as PVA is applied by means of a spinner to arrange the glass substrates 10 with prescribed intervals. After silane treatment, a UV resin is supplied to the surface of a glass holder 20 to form a resin layer 40. Subsequently, a die 50 on which a fine pattern is formed is pressed against the surface of the resin layer 40 and the fine pattern is transferred to the surface of the resin layer 40. After exposure, the die 50 is stripped off from the resin layer 40 on which the fine pattern is formed. Thereafter, parts positioned between glass substrates 10 of the resin layer 40 are cut by a cutter 60 and is immersed in hot water which is set at a predetermined temperature and, thereby dissolving the adhesive 30 to obtain the micro-optical element. COPYRIGHT: (C)2006,JPO&NCIPI
|
