| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method, capable of inspecting, even if the surfaces of inspection targets are of variant shapes, in a short time and with high accuracy, and to provide a surface inspection device. SOLUTION: Only a cone rod 2a, which is determined as being a neutral product by the short-time determination in a high-speed determination station 3, is determined with high precision in a high-precision determination station 5. Accordingly, even if the inspection target is a profile such as a cone rod 2, it can be subjected to determination processing in a short time with high accuracy. COPYRIGHT: (C)2006,JPO&NCIPI
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