| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid injection head and a liquid injection apparatus wherein printing quality is improved by reducing warpage of a substrate, and reliability is also improved. SOLUTION: A head substrate includes: a nozzle plate 20 provided with a nozzle opening 21 discharging liquid droplets: a flow path forming substrate 10 where pressure generating chambers 12 communicating with the nozzle openings 21 are formed; and piezoelectric elements 300 provided in an area corresponding to the pressure generating chambers 12 on the flow path forming substrate 10 via diaphragms and applying pressure to discharge liquid droplets to the insides of the pressure generating chambers 12. The nozzle plate 20 is made of a material having a linear expansion coefficient larger than that of the flow path forming substrate 10. In the head substrate including at least the flow path forming substrate 10 except the nozzle plate 20, a low expansion coefficient member 200 having a low expansion coefficient smaller than that of the flow path forming substrate 10 is provided along a side-by-side arrangement direction of the pressure generating chambers 12, without being bonded to the nozzle plate 20. COPYRIGHT: (C)2006,JPO&NCIPI
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