摘要 |
A composition that includes functionalized polyhedral oligomeric silsesquioxanes derivatives of the formulas T<SUB>m</SUB><SUP>R3 </SUP>where m is equal to 8, 10 or 12 and Q<SUB>n</SUB>M<SUB>n</SUB><SUP>R1,R2,R3 </SUP>where n is equal to 8, 10 or 12 are provided. The functional groups include aqueous base soluble moieties. Mixtures of the functionalized polyhedral oligomeric silsesquioxanes derivatives are highly suitable as a topcoat for photoresist in photolithography and immersion photolithography applications.
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