SUBSTRATE, MINUTE STRUCTURE, REFERENCE SCALE MANUFACTURING METHOD, AND MINUTE STRUCTURE LENGTH MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To precisely and easily perform length measurement irrespective of the posture of a length measuring object. SOLUTION: This substrate 2 is equipped with a substrate body 5 with a measuring object 3 formed on its surface 5a, and a reference scale 6 provided on the surface 5a of the substrate body 5 so as to extend at least in one direction in the vicinity of an area with the measuring object 3 formed therein. The reference scale 6 has a plurality of graduations 7 formed by utilizing a focused ion beam (FIB) and disposed next to each other at predetermined intervals. COPYRIGHT: (C)2006,JPO&NCIPI