| 摘要 |
PROBLEM TO BE SOLVED: To enhance measuring precision for a temperature or a thickness of a measuring object of thin thickness. SOLUTION: This instrument/method/system is provided with a light source 110, a splitter 120 for splitting light from the light source into a measuring light and a reference light, a reference light reflecting means 140 for reflecting the reference light from the splitter, an optical path length changing means (for example, driving means 142 for driving the reference light reflecting means) for changing an optical path length of the reference light reflected from the reference light reflecting means, and a photoreception means 150 for measuring interference waveforms of the plurality of measuring lights obtained by interference of the measuring lights transmitted through or reflected by the measuring object with the reference light reflected from the reference light reflecting means. The optical path length of the measuring light between both end faces of the measuring object is measured by the respective interference waveforms, using as the selected interference waveforms the interference waveforms of the measuring lights reflected going and returning between the both end faces of the measuring object at least twice times or more than the measuring light of a reference interference waveform, using as a reference an interference waveform out of the measured interference waveforms of the measuring lights, and the temperature of the measuring object is measured based on the optical path length. COPYRIGHT: (C)2006,JPO&NCIPI
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