发明名称 Semiconductor device and manufacturing method therof
摘要 A semiconductor device and a manufacturing method thereof which enable to secure high yield and increase the capacity of a capacitor are provided. The semiconductor device according to the present invention includes: a plurality of capacitor layers laminated, each capacitor layer including a plurality of storage electrodes, a capacity insulating film covering the surface of the storage electrodes, and a plate electrode provided between the storage electrodes, wherein the plate electrode of each of the laminated capacitor layers are electrically connected to each other and the corresponding storage electrode of each of the laminated capacitor layers are electrically connected to each other.
申请公布号 US2006186449(A1) 申请公布日期 2006.08.24
申请号 US20060344097 申请日期 2006.02.01
申请人 ELPIDA MEMORY, INC. 发明人 UCHIYAMA HIROYUKI
分类号 H01L29/94;H01L27/108;H01L29/76;H01L31/119 主分类号 H01L29/94
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