| 摘要 |
A method, a recording medium and an apparatus for testing a photomask are provided. In the disclosed method, a particular region of a photomask is selected, either from a physical instance of the photomask, or from the photomask as represented by a digital representation thereof. The particular region is then characterized by identifying a pattern type present in the particular region. A lithographic process stress condition is determined for the particular region, considering the pattern type, and thereafter, a result of lithographically patterning a feature is determined by simulating a photolithographic exposure, using the particular region of the photomask under the lithographic process stress condition. Then, it is decided whether the particular region of the photomask is acceptable based on the result of the simulated exposure only under the lithographic process stress condition.
|
