| 摘要 |
The invention relates to a filter device (100) for an illumination system, especially for the correction of the illumination of the illuminating pupil, comprising a light source, with the illumination system being passed through by a boudle of illuminating rays from the light source to an object plane, with the bundle of illuminating rays impinging upon the filter device (100), comprising at least one filter element (105) which can be introduced into the beam path of the bundle of illuminating rays, with the filter element comprising an actuating device (113), so that the filter element can be brought with the help of the actuating device into the bundle of illuminating rays.
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