| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an adjusting method of a laser beam which is performed simply and surely in a laser beam machining device. <P>SOLUTION: A linear machined mark is formed by scanning a laser beam in the focalizing state and succeedingly a linear working mark is similarly formed in the plus defocused state. In the case the optical axis of the laser beam is not parallel to the z-direction, the center line Td of the machined mark in the case the laser beam is in the plus defocused state is not situated on the same straight line L2 as the center line Tc of the machined mark in the case of the focalizing state and situated by being shifted by a certain distanceΔy1 from the straight line L2. Whether the optical axis has a certain inclination to the z-direction or not is determined by whether or not the center of the machined mark in the plus defocused state is shifted from the center of the machined mark in the focalizing state. The laser beam is orthogonally applied to the material S to be machined by properly repeating the adjustment of the optical axis by a prescribed method and the detection of the related inclination. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
