Laser beam homogenizing device for e.g. laser ablation, has cylindrical lens dividing laser beam into partial beams, where path length difference of two of partial beams is larger than temporal coherence length of laser beam

摘要

The device has a cylindrical lens dividing a laser beam into a set of partial beams (101, 102, 103), and a field lens interfering the partial beams in a plane. A degree prism (501) is arranged before the field lens and the cylindrical lens in a beam direction. A path length difference of two of the partial beams is larger than a temporal coherence length of the laser beam during passing of the laser beam.