| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positioning apparatus for ensuring highly accurate positioning by reducing vibration produced on the mirror of the positioning apparatus including a measuring system using the mirror. <P>SOLUTION: In the positioning apparatus including a position measuring means using a mirror, there are laid a distortion sensor and a distortion actuator at a position where an amount of distortion of a support table is large for supporting the mirror caused by elastic vibration. Further, in the positioning apparatus including a position measuring means using a mirror, there are laid a distortion sensor and a distortion actuator in the vicinity of legs of a support table for supporting the mirror. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
