| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a leveling valve device which can detect small position fluctuations of an object and control the levelness of the object with high precision. <P>SOLUTION: The leveling valve system comprises a leveling valve body 10 for performing pressure control for leveling adjustment, an extension bar 70 extending in the nearly vertical direction with respect to the principal axis of the leveling valve body from the top thereof, a fulcrum part formed at the substantial tip of the extension bar, and an arm 90 turnably engaged with the fulcrum part being a fulcrum. The arm is arranged so that it has a point of application part allowing a principal axis actuation bar to move in the direction of the principal axis and is configured so that it has a point of force part between the point of application part and the fulcrum part for supporting the object to be leveled. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
