| 摘要 |
PROBLEM TO BE SOLVED: To provide a walking-beam heat treatment apparatus preventing the dislocation and falling of a substrate conveyed by the cooperation of a first beam and a second beam suitably. SOLUTION: According to a walking-beam heat treatment apparatus 10, a stationary beam 20 located outside among the stationary beam (first beam) 20 and a movable beam (second beam) 22 for conveying a common substrate 16 in cooperation is provided with a lateral direction guide projection 74 guiding the substrate 16 through engagement with the side edge of the substrate 16 supported by the stationary beam 20. Thus, the dislocation and falling of the substrate 16 conveyed by the cooperation of the stationary beam 20 and the movable beam 22 is suitably prevented. COPYRIGHT: (C)2006,JPO&NCIPI
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