| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor capable of improving adhesion between a dielectric layer and a lower electrode while increasing electrostatic capacity, a method for manufacturing the capacitor, and a filter using the capacitor. SOLUTION: The capacitor 10 includes a lower electrode 14A, a dielectric layer 16 having a SiO<SB>2</SB>layer 20 formed on the lower electrode 14A and an Si<SB>3</SB>N<SB>4</SB>layer 22 formed on the SiO<SB>2</SB>layer 20 and an upper electrode 14B formed on the dielectric layer 16. Since the SiO<SB>2</SB>layer 20 is formed between the lower electrode 14A and the Si<SB>3</SB>N<SB>4</SB>layer 22, the lower electrode 14A is firmly stuck to the Si<SB>3</SB>N<SB>4</SB>layer 22 as compared with a conventional capacitor where the Si<SB>3</SB>N<SB>4</SB>layer 22 is directly formed on the lower electrode 14A. Namely, the invented capacitor 10 has large electrostatic capacity because the dielectric layer 16 is provided with the Si<SB>3</SB>N<SB>4</SB>layer 22 having a high dielectric constant, and improves adhesion between the dielectric layer 16 and the lower electrode 14A as compared with the conventional capacitor. COPYRIGHT: (C)2006,JPO&NCIPI
|
