| 发明名称 |
Insulated pad conditioner and method of using same |
| 摘要 |
A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.
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| 申请公布号 |
US2006189140(A1) |
申请公布日期 |
2006.08.24 |
| 申请号 |
US20060405862 |
申请日期 |
2006.04.18 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
PALMGREN GARY M.;GOERS BRIAN D.;PYSHER DOUGLAS J. |
| 分类号 |
H01L21/461;B24B37/04;B24B53/007;H01L21/302 |
主分类号 |
H01L21/461 |
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