发明名称 Device for mounting an optical element, particularly a lens in an objective
摘要 In the case of a device for mounting a lens or a mirror in an objective, particularly a microlithography projection objective for producing semiconductor elements, the lens or the mirror is connected to a mount directly or via an intermediate element by means of a number of bearing elements. A number of bearing locations are provided on the lens or the mirror or the intermediate element. In each case two bearing locations are respectively connected via connecting points to the two ends of a balance beam of a first series of balance beams. The first series of balance beams is arranged so as to yield at least three articulation points for fastening on the mount.
申请公布号 US2006187511(A1) 申请公布日期 2006.08.24
申请号 US20060333975 申请日期 2006.01.17
申请人 RAU JOHANNES 发明人 RAU JOHANNES
分类号 G02B26/08;G02B7/02;G02B7/182;G03F7/20 主分类号 G02B26/08
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