摘要 |
In the case of a device for mounting a lens or a mirror in an objective, particularly a microlithography projection objective for producing semiconductor elements, the lens or the mirror is connected to a mount directly or via an intermediate element by means of a number of bearing elements. A number of bearing locations are provided on the lens or the mirror or the intermediate element. In each case two bearing locations are respectively connected via connecting points to the two ends of a balance beam of a first series of balance beams. The first series of balance beams is arranged so as to yield at least three articulation points for fastening on the mount.
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