ELECTRON BEAM DEVICE

摘要

An electron beam device in which an evaluation area is divided into sub-fields of view, the sub-fields of view are sequentially irradiated with a primary electron beam, secondary electrons having information on the sample surface are detected for each sub-field of view by detecting means, and thus information on the evaluation area is obtained. High-speed image capturing can be realized even by using an area sensor of a small number of frames/sec. The detecting means (26) of the electron beam device has unit detectors (24-1) each composed of area sensors (CCD1 to CCD14), an optical fiber bundle (25) of optical fibers one end of which is coupled to the detection surfaces of the area sensors, and an FOP applied to the other end of the optical fiber bundle and provided with a scintillator on which the sedentary electron beams of the sub-fields of view are focused. The secondary electron beam from the sub-field of view is deflected by an electromagnetic deflector to move on the FOP surfaces of the unit detectors every time the sub-field of view irradiated with the electron beam is changed. Image information can be taken out from each unit detector during exposure of another unit detector. Consequently, high-speed image capturing can be realized.