TRAP DEVICE

摘要

A system for conveying a gas stream from an enclosure to a vacuum pump comprises a first conduit portion for receiving the gas stream at one end thereof and extending to a branch portion at which the first conduit portion branches into a second conduit portion extending outwardly from the first conduit portion and a third conduit portion being a substantial continuation of the first conduit portion; a trap device comprising an inlet connected to an outlet of the third conduit portion, and a chamber for collecting particulates separated from the gas stream as it changes direction to enter the second conduit portion from the first conduit portion; and an anti-surge valve located within the second conduit portion.