| 摘要 |
PROBLEM TO BE SOLVED: To propose a conveying apparatus of a substrate material, which first realizes stable conveying of a extremely thinned substrate material, secondly, more specifically, enables stable conveying of a substrate material having a thickness of not more than 0.5 mm, and thirdly moreover can realize this in terms of cost. SOLUTION: This transfer apparatus 7 is used in a surface processing apparatus 6 for performing surface processing while transferring the substrate material A, wherein transfer rollers 9, 10 are arranged with a step, and the substrate material A is transferred in a curvature manner. That means, in this substrate material A, circuits are formed on both the front and rear surfaces. The transfer rollers 9, 10 are vertically paired and arranged in many arrays front/rear and right/left; and they do not contact the circuit surface of the substrate material A, but will contactly rotate with portions other than the circuit surface sandwiched from above and below. The surface treatment is performed by jetting a treatment liquid B from upper and lower spray nozzles 5. The transfer rollers 9, 10 are vertically arranged like a step for the front and rear or the right and left, thereby transferring the substrate material A in the front and rear or the right and left so as to make a curvature manner. COPYRIGHT: (C)2006,JPO&NCIPI
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