| 摘要 |
PROBLEM TO BE SOLVED: To prevent an evaporation pan from locally becoming high temperature. SOLUTION: The rear face of a bottom face 50 of the evaporation pan 41 is stuck with an evaporation pan heater 60, wiring is performed in a zigzag state along a width direction of the bottom face 50 in a rear part area 52, and a pitch between respective heater wires 61 is maximum in a center part and is reduced toward both the ends. Wiring is performed in a zigzag state along a lengthwise direction of the bottom face 50 in a front part area 51, and six heater wires 61 have an equal pitch here, and the pitch d is made to be nearly equal to a pitch c (a minimum pitch) of an end part on the rear part area 52 side. A temperature sensing tube 65 is stuck and installed on the surface of the bottom face 50 on the front part area 51 side correspondingly to the direct front of the third heater wire 61B from the front side. A disposition part of the temperature sensing tube 65 becomes high temperature in an early stage, and electricity carrying to the heater 60 is shut off when the part reaches to an operation temperature. Accordingly, a temperature of another part is lower than a temperature near the disposition part of the temperature sensing tube 65, or is kept in a nearly same temperature at most. COPYRIGHT: (C)2006,JPO&NCIPI
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