| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of blade coating which gives a very good coating layer of uniform thickness without generating any streak at the end part of a coating layer on the surface of a disk D, any thick coat on the upstream end, or any irregular thickness over the whole surface. SOLUTION: The method is a method of blade coating which coats the surface of a target substrate to be coated with a coating liquid by a blade and forms a coating layer on it. While the liquid held in a liquid storage of the upstream side of the blade is transferred by the blade relatively moved from the upstream side of the substrate to the downstream side at a predetermined distance from the substrate with a mask having a large opening overlapped on the substrate the coating layer is formed by discharging a coating liquid onto the mask from a gap of the downstream side of the blade. In this coating method, The quantity of a liquid held in the liquid storage of the upstream side of the blade is to be two to five times of the quantity of a liquid applied on one sheet of the substrate by one stroke of the blade. COPYRIGHT: (C)2006,JPO&NCIPI
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