发明名称 N-TYPE TRANSISTOR, N-TYPE TRANSISTOR SENSOR AND MANUFACTURING METHOD FOR N-TYPE TRANSISTOR CHANNEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a new n-type transistor, an n-type transistor sensor and a manufacturing method for the n-type transistor channel that is different from the conventional devices in the transistor, using a nanotube-shaped structure for the channel. <P>SOLUTION: The transistor 1 has a source electrode 2, a drain electrode 3, a gate electrode 4 and the n-type channel 5 formed between the source electrode 2 and the drain electrode 3, and formed of the nanotube-shaped structure. A film 6, made of a nitrogen compound, is formed directly on the channel 5 for the transistor 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006222279(A) 申请公布日期 2006.08.24
申请号 JP20050034476 申请日期 2005.02.10
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY;MITSUBISHI CHEMICALS CORP 发明人 MATSUMOTO KAZUHIKO;KOJIMA ATSUHIKO;NAGAO SATORU
分类号 H01L29/786;G01N27/414;H01L21/318;H01L21/336;H01L29/06;H01L51/05 主分类号 H01L29/786
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