| 摘要 |
PROBLEM TO BE SOLVED: To provide a nonlinear element for which an electric characteristic and reliability can be improved without causing complication of a manufacturing process, and to provide an electrooptical apparatus provided with this nonlinear element as a pixel switching element, and provide a manufacturing method of the nonlinear element. SOLUTION: The nonlinear element 10 has a lower electrode 13 consisting of a tantalum or the like, an oxide film 14 formed by anodizing the surface of the lower electrode 13, and an upper electrode 15 opposing the lower electrode 13 via the oxide film 14. The lower electrode 13 includes an oxygen non-containing layer 132 not containing oxygen in the lower layer side, an oxygen content gradually increasing layer 133 in which an oxygen content continuously increases toward the upper layer side, and an uppermost layer 131 containing oxygen. COPYRIGHT: (C)2006,JPO&NCIPI |
