| 摘要 |
PROBLEM TO BE SOLVED: To improve the dimensional precision of the nozzles on the droplet ejection side. SOLUTION: A method of manufacturing a nozzle plate with nozzles which eject liquid droplets comprises steps of forming and patterning an opaque metal film 102 onto a transparent substrate 100, forming photosensitive resin 104 over the opaque metal film, exposing the photosensitive resin to light from a side adjacent to the transparent substrate, developing the photosensitive resin which has been exposed to the light, forming a metal layer 110 on the opaque metal film and separating at least the transparent substrate from the metal layer. The nozzle plate comprises at least the metal layer and a liquid droplet ejection surface of the nozzle plate on a side where the transparent substrate has been separated in the separation step. COPYRIGHT: (C)2006,JPO&NCIPI
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