发明名称 |
Scanning electron microscope |
摘要 |
A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
|
申请公布号 |
US2006186337(A1) |
申请公布日期 |
2006.08.24 |
申请号 |
US20050230642 |
申请日期 |
2005.09.21 |
申请人 |
HATANO MICHIO;ITO SUKEHIRO;TOMITA SHINICHI;KATANE JUNICHI |
发明人 |
HATANO MICHIO;ITO SUKEHIRO;TOMITA SHINICHI;KATANE JUNICHI |
分类号 |
H01J37/28;H01J37/244 |
主分类号 |
H01J37/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|