发明名称 |
Verfahren zum Ziehen von Einkristallen aus einer Schmelze |
摘要 |
A crucible is situated in a vacuum chamber and provided with a feeder for granulate material, heating elements for melting the material, and a crystal puller above the crucible. Measuring elements provide signals for a controller including a fuzzy processor utilizing an empirically determined data field to output a signal for the material feeder. |
申请公布号 |
DE4301072(B4) |
申请公布日期 |
2006.08.24 |
申请号 |
DE19934301072 |
申请日期 |
1993.01.16 |
申请人 |
CRYSTAL GROWING SYSTEMS GMBH |
发明人 |
ALTEKRUEGER, BURKHARD;FLACHSEL, MARTIN;GESCHE, ROLAND;AUFREITER, JOACHIM |
分类号 |
C30B15/20;C30B15/02;G05B13/02 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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