| 摘要 |
PROBLEM TO BE SOLVED: To provide a deflection scanner in which a axis tilt is easily and accurately measured. SOLUTION: The deflection scanner has: a rotating polygon mirror which deflects and scans a light beam; a flange member which holds the rotating polygon mirror on a rotating member; a rotor which is connected to the flange member as a unit; a rotating member which is composed of the flange member, the rotor and a rotating shaft or the like; and a bearing part composed of a sleeve part or the like which freely rotatably supports the rotating shaft. The deflection scanner is characterized in that the bearing part has a substantial mirror face. In this case, it is preferable that the mirror face is formed on the sleeve. Further, it is preferable that the bearing part has a thrust cover, and the substantial mirror face is formed on the thrust cover. It is preferable that the substantial mirror face has the arithmetic mean roughness Ra of 0.8μm or smaller and the bearing part is composed of a fluid dynamic pressure bearing. COPYRIGHT: (C)2006,JPO&NCIPI |
