| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor, its manufacturing method, a filter using it and a dielectric thin film using it for improving the adhesiveness of a dielectric layer and a lower electrode while increasing an electrostatic capacity. SOLUTION: A capacitor 10 is provided with a lower electrode 14A; a dielectric layer 16 having an SiO<SB>2</SB>layer 20 formed on the lower electrode 14A, an SiON layer 21 formed on the SiO<SB>2</SB>layer 20, and an Si<SB>3</SB>N<SB>4</SB>layer 22 formed on the SiON layer 21; and an upper electrode 14B formed on the dielectric layer 16. When the SiO<SB>2</SB>layer 20 is interposed between the lower electrode 14A and the Si<SB>3</SB>N<SB>4</SB>layer 22, the lower electrode 14A and the Si<SB>3</SB>N<SB>4</SB>layer 22 are more strongly adhered than such a case that the Si<SB>3</SB>N<SB>4</SB>layer 22 is directly formed on the lower electrode 14A just like a conventional capacitor. Furthermore, when the SiON layer 21 is interposed between the SiO<SB>2</SB>layer 20 and the Si<SB>3</SB>N<SB>4</SB>layer 22, the SiO<SB>2</SB>layer 20 and the Si<SB>3</SB>N<SB>4</SB>layer 22 are more strongly adhered. COPYRIGHT: (C)2006,JPO&NCIPI
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