| 摘要 |
PROBLEM TO BE SOLVED: To provide a light illumination device which can simultaneously inspect elements on a board to be inspected, as many as possible, at high illuminance. SOLUTION: The light illumination device comprises a mounting means 12 for mounting thereon a board 11 to be inspected, having a plurality of imaging elements arranged thereon, illumination means 4 to 9 for illuminating the inspection board mounted on the mounting means to form a rectangular illumination zone 10 on the inspection board, and a rotating means 16 for changing the tilt angle of the imaging elements of a side direction of the rectangular illumination zone relative to the element aligned direction. COPYRIGHT: (C)2006,JPO&NCIPI
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