| 摘要 |
PROBLEM TO BE SOLVED: To improve a throughput by shortening the conveyance time duration of a cassette in a substrate processing apparatus. SOLUTION: The substrate processing apparatus includes a heat treatment furnace 6; a substrate holder 8; a substrate conveyance vessel containing means 3; a material conveying/delivering unit 2; one set of conveying means 4 for performing the conveyance of a substrate vessel; a substrate transfer means 9; a control means 13 for controlling the conveying means and the substrate transfer means; a designating means for specifying the conveying operation mode which forbids the above conveying means from performing the conveyance of the above substrate conveyance vessel between a buffer container and the above material conveying/delivering unit; and a selecting means for selecting a conveyance operation mode specified by this designation means and a conveyance operation mode which can convey the substrate conveyance vessel between the above buffer container and the above material conveying/delivering unit, even during the periods of the need that the above conveying means performs the conveyance of the substrate conveyance vessel between an object to be transferred and the above buffer container or the above material conveying/delivering unit by the conveying means. COPYRIGHT: (C)2006,JPO&NCIPI
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