| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical microscope system which can quickly and surely correct the focusing point and aberrations in a simple configuration. SOLUTION: The optical microscope 1 has a sample 13 irradiated with light and observes the light the sample 13 emits. It has an adaptive mirror 18 for variably forming its reflector shape to reflect the illumination light, a compensation table 22 for storing the reflector surface shapes to correct the focusing position and the aberrations following the changes of the focusing position and the aberrations of the objective lens 39, and a controller 21 which makes the adaptive mirror 18 form reflector surface shapes the compensation table 22 stores and picks up the shape that is most suitable for the correction of the focusing point and the aberrations for making the adaptive mirror 18 form this shape. COPYRIGHT: (C)2006,JPO&NCIPI
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