SUCTION DETECTION METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a suction detection method capable of surely detecting suction and separation of a workpiece based on a flow rate flowing in a flowing path of a suction tool. SOLUTION: When the flow rate of negative pressure air flowing inside a passage of a suction member becomes not more than the upper limit LON(F point) after the flow rate L in a passage formed inside the suction member and connected with a negative pressure source becomes not less than the upper limit value LONof the suction range under the state of the suction member idly sucking without contact with a workpiece, the detection device determines that the workpiece is sucked by the suction member, and moves the suction member to move the workpiece from a current position to another position. When the workpiece is transferred to a predetermined position, the supply of the negative pressure air to the suction member is stopped (H point), and the workpiece is judged to be separated from the suction member when the flow rate of the air flowing in the suction member becomes not larger than the lower limit value LOFFunder the stopped state. COPYRIGHT: (C)2006,JPO&NCIPI