PRESSURIZING TYPE LAMP ANNEALING DEVICE, PRESSURIZING TYPE LAMP ANNEALING METHOD, THIN-FILM, AND ELECTRONIC COMPONENT

摘要

A pressurizing type lamp annealing device and a pressurizing type lamp annealing method capable of performing a lamp annealing in a pressurized state, a thin film, and an electronic component. The pressurizing type lamp annealing device comprises a treatment chamber (55) in which a wafer (2) as a treated substrate is introduced, a pressurizing mechanism pressurizing the inside of the treatment chamber, and a lamp heater (5) radiating a lamp light onto the wafer (2).