| 摘要 |
<p>A susceptor including
a base plate (1) on which wafers are mounted and
a ring plate (2) detachably connected to the base plate (1) having hollow wafer pockets (21a-f) storing the wafers when connected to the base plate, wherein a tapered area (22b) is formed on the side wall of each wafer pocket so that the opening diameter of the wafer pocket declines in the direction from the bottom to the top of the wafer pocket.</p> |
