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发明名称
EQUIPMENT FOR FIXING WAFER GUIDE IN SEMICONDUCTOR PRODUCT DEVICE
摘要
申请公布号
KR20060092357(A)
申请公布日期
2006.08.23
申请号
KR20050013062
申请日期
2005.02.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, CHUL
分类号
H01L21/304;H01L21/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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