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发明名称
SELECTIVE DEPOSITION OF MATERIAL ON A SUBSTRATE ACCORDING TO AN INTERFERENCE PATTERN
摘要
申请公布号
EP1269225(B1)
申请公布日期
2006.08.23
申请号
EP20010923075
申请日期
2001.04.02
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
MOSHREFZADEH, ROBERT, S.;BALLEN, TODD, A.
分类号
G02B5/30;C23C16/04;C23C16/48;G02B5/18
主分类号
G02B5/30
代理机构
代理人
主权项
地址
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SYSTEME DE SECURITE
