| 摘要 |
An optical inspection device (1) that detects holes in an object to be inspected (11), comprising: a light source (41) that illuminates the object to be inspected by emitting illumination light from light-emitting points (41a) that are arranged in a linear or planar pattern; a fluorescent member (61), disposed on the opposite side from the light sources across the object to be inspected, having an incident surface (61A) on which the part of the illumination light emitted from the light source that passes through the holes in the object to be inspected falls incident, and a detection surface (61B) from which fluorescent light that is generated according to the incidence of the illumination light is emitted; and a photodetector (71) that detects fluorescent light that is emitted from the detection surface of the fluorescent member. <IMAGE> <IMAGE> |
