| 摘要 |
The method involves depositing a gold layer on a substrate (10) with a superficial titanium layer. A resin mask (16), with a shape corresponding to the shape of a desired microstructure (20), is formed on the gold layer. Openings of the masks are filled by a gold mask (18). The mask (16) and portions of the gold layer are eliminated. The uncovered titanium surface across the gold mask is processed, to fabricate the microstructure. |
