发明名称 |
Apparatus and process for crystal growth |
摘要 |
An apparatus for vapour phase crystal growth of multiple single trystals in one growth cycle comprises one central source chamber, a plurality of growth chambers, a plurality of passages for transport of vapour from the source chamber to the growth chambers, the source chamber being thermally decoupled from the growth chambers. The apparatus can be used in the production of semiconductor, optoelectronic or optical crystals. |
申请公布号 |
GB2423307(A) |
申请公布日期 |
2006.08.23 |
申请号 |
GB20050003634 |
申请日期 |
2005.02.22 |
申请人 |
THE UNIVERSITY OF DURHAM;DURHAM SCIENTIFIC CRYSTALS LTD |
发明人 |
ARNAB BASU;MAX ROBINSON;BEN CANTWELL;ANDY BRINKMAN |
分类号 |
C30B23/00;C30B29/48;C30B35/00 |
主分类号 |
C30B23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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