发明名称 |
METHOD OF MAKING A MEMS ELECTROSTATIC CHUCK |
摘要 |
The present invention is directed to a method of forming a clamping plate for a multi-polar electrostatic chuck. The method comprises forming a first electrically conductive layer over a semiconductor platform and defining a plurality of portions of the first electrically conductive layer which are electrically isolated from one another. A first electrically insulative layer is formed over the first electrically conductive layer, the first electrically insulative layer comprising a top surface having a plurality of MEMS protrusions extending a first distance therefrom. A plurality of poles are furthermore electrically connected to the respective plurality of portions of the first electrically conductive layer, wherein a voltage applied between the plurality of poles is operable to induce an electrostatic force in the clamping plate.
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申请公布号 |
KR20060092245(A) |
申请公布日期 |
2006.08.22 |
申请号 |
KR20067007513 |
申请日期 |
2006.04.19 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
KELLERMAN PETER;QIN SHU;ALLEN ERNIE;BROWN DOUGLAS |
分类号 |
H01L21/687;B81C1/00;H01L21/683 |
主分类号 |
H01L21/687 |
代理机构 |
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地址 |
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