发明名称 Oxidation-resistant conducting perovskites
摘要 The present invention provides a semicondctor device that includes a conductor comprised of first and second layers of perovskite that have different stoichiometric compositions. The conductors provide a good template for the formation of dielectric layers thereon and are resistant to oxidizing environments used in semiconductor processing.
申请公布号 US7095067(B2) 申请公布日期 2006.08.22
申请号 US20030445414 申请日期 2003.05.27
申请人 LUCENT TECHNOLOGIES INC. 发明人 HWANG HAROLD Y.;OHTOMO AKIRA;MULLER DAVID
分类号 H01L29/76;H01L21/02;H01L21/8246 主分类号 H01L29/76
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