Fabrication method of multiple band surface acoustic wave devices

摘要

In a fabrication method of a SAW device, a first conductive layer, an etch-stop layer made of conductive material and a second conductive layer are formed one atop another in order on a piezoelectric ceramic substrate. A mask is provided on a first portion of the second conductive layer corresponding to a first SAW filter. A second portion of the second conductive layer corresponding to a second SAW filter is selectively removed using the mask. The mask is removed and a photoresist pattern used for forming electrodes of the SAW filters is provided on the first portion of the second conductive layer corresponding to the first SAW filter region and on a first portion of the etch-stop layer corresponding to the second SAW filter region. The first and second conductive layers and the etch-stop layer are selectively removed using the photoresist pattern, and the photoresist pattern is then removed.