APPARATUS FOR CONTROLLING GAP BETWEEN ELECTRODS OF SEMICONDUCTOR EQUIPMENT,申请号KR20050011854-传众专利搜索

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发明名称	APPARATUS FOR CONTROLLING GAP BETWEEN ELECTRODS OF SEMICONDUCTOR EQUIPMENT
摘要
申请公布号	KR20060091348(A)	申请公布日期	2006.08.21
申请号	KR20050011854	申请日期	2005.02.14
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JUNG, YON CHUL
分类号	H01L21/3065;H01L21/68	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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