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发明名称
Imprinting device and substrate holding device thereof
摘要
申请公布号
KR100613655(B1)
申请公布日期
2006.08.21
申请号
KR20040019883
申请日期
2004.03.24
申请人
发明人
分类号
H01L21/027;G03C5/00;G03F7/00;G03G13/06;G03G13/20
主分类号
H01L21/027
代理机构
代理人
主权项
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