CELL FOR MEASUREMENT OF DIELECTRIC PARAMETERS OF THIN FILMS OF COMPLEX OXIDES

摘要

FIELD: measurement of dielectric parameters of thin films of complex oxides used in manufacture of lithium - ion cells. ^ SUBSTANCE: a film pattern of electrodes of nickel, copper or aluminum in the form of comb-like electrodes is applied onto the supporting structure of glass ceramic or polycor through a mask by vacuum spraying. A film of complex oxide is applied onto the surface of the contours. The electrodes are made of metal applied on the supporting structure in the form of comb-like contours with the combs directed toward one another, inserted one in the other and coated by a thin film 0.3 - to 0.9mum thick. ^ EFFECT: enhanced precision of measurement, provided multiple use of cells. ^ 3 ex, 3 tbl, 2 dwg