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发明名称
PLASMA PROCESSING APPARATUS, FOCUS RING, AND SUSCEPTOR
摘要
申请公布号
KR100613198(B1)
申请公布日期
2006.08.18
申请号
KR20040028391
申请日期
2004.04.23
申请人
发明人
分类号
H01L21/3065;H01L21/00;H01L21/683
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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